N2 gas molecules RF Glow Discharge in GaN， new materials such as synthetic surface and the metal nitride technology and other fields has been widely In this paper， in order to better understand the molecular nitrogen and other gases in the discharge of space plasma discharge process mechanism， on the establishment of a nitrogen capacitive coupling of the RF glow discharge particle simulation combined with Monte Carlo (PIC / MCC ) and from the simulation of the N2 RF discharge electricity in the space distribution of the electric field and charged particles (e， N2 +， N +) Main calculated from the electric potential and the electric field， particle (e， N2 +， N +) density， energy distribution and important activity of the nitrogen particle generation and
